I am Dr. Yeonguk Ko
My research field is metrology on semicondctor devices and interaction between samples and electron beam using Monte Carlo method. Now I am working on charging effects in e-beam lithography with simulation and experiment.
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I am Dr. Yeonguk Ko
My research field is metrology on semicondctor devices and interaction between samples and electron beam using Monte Carlo method. Now I am working on charging effects in e-beam lithography with simulation and experiment.
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