The University of Tennessee
METROLOGY AND LITHOGRAPHY GROUP
Welcome to the Home Page of the University of Tennessee Metrology and Lithography Group.
We are developing techniques for the metrology and imaging of semiconductor devices using electron-beam
tools. As part of this effort we have developed databases and Monte Carlo simulations that we hope may
be of use to your work as well. Feel free to download and share these items. You may contact us at
firstname.lastname@example.org. We thank the SRC for their support of this work.
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