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MSE 630 - Thin Film Materials Processing |
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MAIN |
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catalog Description |
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MSE 630 - Thin Film Materials Processing In this course, students learn materials issues and
thin film processing techniques used to manufacture semiconductor
devices. Topics include
basic vacuum technology, plasma physics, sputtering, evaporation
(resistive, electron beam, laser ablation), chemical vapor deposition,
and etching. The mechanisms of each process are explored and relevant
material chemistries are discussed.
Thin film growth models are also explained and processing
variables are related to material properties.
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news & ANNOUNCEMENTS |
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READING ASSIGNMENTS |
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