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The University of Tennessee

METROLOGY AND LITHOGRAPHY GROUP


              Welcome to the Home Page of the University of Tennessee Metrology and Lithography Group.
      We are developing techniques for the metrology and imaging of semiconductor devices using electron-beam
        tools. As part of this effort we have developed databases and Monte Carlo simulations that we hope may
        be of use to your work  as well. Feel free to download and share these items. You may contact us at
        djoy@utk.edu. We thank the SRC for their support of this work.

Group member list


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